AlAsySb1−y and InAsySb1−y ternaries have been grown by Molecular Beam Epitaxy on (001) GaAs and (001) InAs substrates. Growth parameters and composition of the layers were determined by reflection high-energy electron diffraction and single-crystal X-ray diffraction measurements, respectively. The compositional dependence of AlAsySb1−y and InAsySb1−y on the ratio of Sb4 to As2 (or As4) fluxes as well as on the substrate temperature has been investigated and can be explained qualitatively. The `smoothing' effect of Sb during the growth has been observed.
Thin Solid Films