Apr 9, 2020

Coplanar Integration of Lattice-Mismatched Semiconductors with Silicon by Wafer Bonding Ge / Si1 − x Ge x  / Si Virtual Substrates

We have demonstrated a general process which could be used for the integration of lattice-mismatched semiconductors onto large, Si-sized wafers by wafer bonding  virtual substrates. The challenges for implementing this procedure for large diameter Ge-on-insulator (GOI) have been identified and solved, resulting in the transfer of epitaxial  to a Si wafer. We found that planarization of Ge virtual substrates was a key limiting factor in the transfer process. To circumvent this problem, an oxide layer was first deposited on the Ge film before planarization using a standard oxide chemical mechanical planarization process. The GOI structure was created using -induced layer exfoliation (Smartcut™) and a buried  etch-stop layer, which was used to subsequently remove the surface damage with a hydrogen peroxide selective etch. After selective etching, the crosshatched surface morphology of the original virtual substrate was preserved with roughness of <15 nm rms as measured on a  scale and a  scale roughness of  Using an etch-stop layer, the transferred device layer thickness is defined epitaxially allowing for future fabrication of ultrathin GOI as well as III-V films directly on large-diameter Si wafers. © 2004 The Electrochemical Society. All rights reserved.


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