PAM-XIAMEN,
a wafer substrate supplier, offers epi ready substrate wafer as follows:
Wikipedia: |
Substrate is a solid (usually planar) substance onto which a layer of another substance is applied, and to which that second substance adheres. In solid-state electronics, this term refers to a thin slice of material such as silicon, silicon dioxide, aluminum oxide, sapphire, germanium, gallium arsenide (GaAs), an alloy of silicon and germanium, or indium phosphide (InP). These serve as the foundation upon which electronic devices such as transistors, diodes, and especially integrated circuits (ICs) are deposited. |
In the manufacture of ICs, the substrate material is usually formed into or cut out as thin discs called wafers, into which the individual electronic devices (transistors, etc.) are etched, deposited, or otherwise fabricated. |
Epi substrate wafer:
1)SiC substrate 2”,3”,4”
Orientation :0°/4°±0.5° |
Single Crystal 4H/6H |
Thickness (250 ± 25) μm (330 ± 25) μm (430 ± 25) μm |
Type:N/SI |
Dopant:Nitrogen/V |
Resistivity (RT): 0.02 ~ 0.1 Ω·cm/>1E5 Ω·cm |
FWHM: A<30 arcsec B/C/D <50 arcsec |
Packaging:Single wafer box or multi wafer box |
2)GaN substrate 1.5",2”,3",4"6"
Free-standing (gallium nitride) GaN Substrate |
Orientation:C-axis(0001)+/-0.5° |
Thickness:350um |
Resistivity(300K): <0.5Ω·cm >106Ω·cm |
Dislocation Density:<5x106cm-2 |
TTV:<=15um |
BOW:<=20um |
Surface Finish:Front Surface:Ra<0.2nm.Epi-ready polished |
3)Germanium substrate 2”,3”,4”
Orientation : <100> +/- 0.5 degree |
Type / Dopant : N / Sb; P / Ga |
Diameter : 100 mm |
Thickness : 525 +/- 25 um |
Resistivity : 0.1 ~ 40 ohm-cm |
Primary flat location : <110>+/-0.5 degree |
Primary flat length : 32.5 +/-2.5 mm |
Front surface : Polished |
Back surface : Etched |
Edge surface finishing : cylindrical ground |
Surface roughness ( Ra ) : <=5A |
EPD : <= 5000 cm-2 |
Epi ready : yes |
Package : Single wafer container |
4)CdZnTe substrate (15mm*15mm±0.05mm(25mm*25mm±0.05mm,30mm*30mm±0.05mm)
Orientation (111)B,(211)B |
Thickness: |
Doped:Undoped |
Resistivity:≥1MΩ.cm |
EPD≤1x105/cm3 |
Double side polished |
5)GaAs substrate wafer 2”,3”,4”,6”
Thickness:220~500m | |||||
Conduction Type:SC/n-type | |||||
Growth Method:VGF | |||||
Dopant:Silicon/Zn | |||||
Orientation:(100)20/60/150 off (110) | |||||
Resistivity at RT:(1.5~9)E-3 Ohm.cm | |||||
Packaging:Single wafer container or cassette
|
6)Substrate silicon
wafer
Growing method:FZ/CZ |
Orientation:<111>/<100> |
Off-orientation:4±0.5 degree to the nearest <110> |
Type/Dopant:P/Boron,N/Phosphorus |
Resistivity:10-20 W.cm/0.1-1 W.cm |
RRV:≤15% (Max edge-Cen)/Cen |
7)Sapphire substrate
wafer 2",3",4"
Conduction Type:N-type /Semi-insulating/P |
Dopant:Si doped or undoped/Fe/Mg |
Thickness:4um,20um,30um,50um,100um |
Orientation:C-axis(0001)+/-1° |
Resistivity(300K):<0.05Ω·cm |
Dislocation Density:<1x10^8cm-2 |
Substrate Structure: GaN on Sapphire(0001) |
Surface Finish:Single or Double Side Polished,epi-ready |
Usable Area :≥ 90 % |
8)InP
substrate 1",2",3",4"
Orientation:(111) |
Thickness:300-500um |
Type/Dopant:N/P/Si,Zn/Undoped/Fe |
Resistivity:>1E7 |
9)InAs
substrate
Orientation:(110) |
Diameter:40.0mm,50.8mm |
Thickness:500um,400um |
Type Dopant:P,N/S,N/Te |
Orientation:(111)B |
Diameter:50.8mm |
Thickness:N/A |
Type Dopant:N/S |
Nc:(1-3)E18a/cm3 |
Related
Products: Sapphire wafer, Si wafer ZnO wafer MgO wafer SiC substrate GaAs epi wafer GaN epi wafer GaN on Si GaN on SiC GaN on Sapphire SOURCE:PAM-XIAMEN |
If you need more information about substrate wafer, please visit our website:http://www.qualitymaterial.net , send us email at powerwaymaterial@gmail.com.
Can you offer SiC mono crystal material with high Thermal Conductivity > 490 W/mK, wafers with thickness: 300-1000um for semiconductor devices heat sinks manufacturing?
ReplyDeleteThermal Conductivity> 490 W/mK is theory value of SiC mono, however we tested some wafers, the thermal conductivity is below 450W/mK, which are lower the theory value.
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